Publications by Peter Vettiger

Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip-One-Channel Setup

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Vettiger, Frédéric Loizeau

With their capability for real-time and label-free detection of targets ranging from gases to biological molecules, nanomechanical sensors are expected to contribute to various fields, such as medicine, security, and environmental science. For practical ap ...

American Chemical Society2013

Piezoresistive Membrane-Type Surface Stress Sensor Arranged In Arrays For Cancer Diagnosis Through Breath Analysis

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Vettiger, Frédéric Loizeau, Christoph Gerber

We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 5 0 ...

IEEE2013

Two-dimensional cantilever array with varying spring constants and tip radii for life-science applications

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Vettiger, Frédéric Loizeau, André Meister

A fabrication process for realising two-dimensional cantilever arrays for parallel force spectroscopy of biological samples is presented. The parallel optical atomic force microscopy readout system has been developed and presented elsewhere. The arrays are ...

2012

All-stencil transistor fabrication on 3D silicon substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Cyrille Hibert, Philippe Langlet, Cristina Martin Olmos, Oscar Vazquez Mena, Katrin Sidler Arnet, Peter Vettiger

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...

Iop Publishing Ltd2012

Membrane-Type Surface Stress Sensor with Piezoresistive Readout

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Vettiger, Frédéric Loizeau

We present the fabrication and characterization of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 mu m and a thickness of 2.5 mu m ...

Elsevier Science Bv2012

Parallel AFM imaging and force spectroscopy using two-dimensional probe arrays for applications in cell biology

Peter Vettiger, Harry Heinzelmann, Mélanie Favre, Martha Liley, André Meister

Atomic force microscopy (AFM) investigations of living cells provide new information in both biology and medicine. However, slow cell dynamics and the need for statistically significant sample sizes mean that data collection can be an extremely lengthy pro ...

Wiley-Blackwell2011

Parallel optical readout of cantilever arrays in dynamic mode

Peter Vettiger

Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser-diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the receiv ...

Institute of Physics2010

Sub-ppm detection of vapors using piezoresistive microcantilever array sensors

Terunobu Akiyama, Peter Vettiger, Laure Aeschimann, Christoph Gerber

The performance of microfabricated piezoresistive cantilever array sensors has been evaluated using various vapors of volatile organic compounds including alkanes with different chain length from 5 (n-pentane) to 14 (n-tetradecane). We demonstrate that pie ...

2009