Publications by Marco Mazza | EPFL Graph Search

Low-energy biomarker detection through charge-based impedance measurements

Mihai Adrian Ionescu, Junrui Zhang, Marco Mazza

A novel approach for the detection of biomarkers in aqueous condition via differential impedance is presented. The binding of biomarkers onto functionalized inter-digital electrodes induces a change in the sensor impedance, both in its real and imaginary c ...

2016

Design, development, and validation of an in-situ biosensor array for metabolite monitoring of cell cultures

Giovanni De Micheli, Sandro Carrara, Jacopo Olivo, Cristina Boero, Marco Mazza, Maria Antonietta Casulli, Lorenzo Foglia

Conventional pharmaceutical processes involving cell culture growth are generally taken under control with expensive and long laboratory tests performed by direct sampling to evaluate quality. This traditional and well-established approach is just partiall ...

Elsevier2014

Electrical modeling and design of a wafer-level package for MEM resonators

Mihai Adrian Ionescu, Anja Skrivervik, Julien Perruisseau-Carrier, Marco Mazza

This paper presents the electrical design and characterization of a wafer-level, or 0-level, package for micro-electromechanical resonators. We start by identifying the requirements on the electrical parasitics of a packaged resonator, derived from an anal ...

Institute of Electrical and Electronics Engineers2010

Nano-gap high quality factor thin film SOI MEM resonators

Mihai Adrian Ionescu, Marco Mazza, Dimitrios Tsamados, Daniel Grogg, Nicoleta-Diana Ciressan, Hüseyin Cumhur Tekin

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization voltages. A motional resistance of ...

2008

Multi-gate vibrating-body field effect transistor (VB-FETs)

Mihai Adrian Ionescu, Marco Mazza, Dimitrios Tsamados, Daniel Grogg

This paper reports on the design, fabrication and detailed characteristics of multi-gate vibrating-body field effect transistors (VB-FETs). Double-gate and four-gate VB-FETs with resonance frequencies of 2 MHz and 71 MHz, respectively, are successfully dem ...

2008

Nano-gap micro-electro-mechanical bulk lateral resonators with high quality factors and low motional resistances on thin silicon-on-insulator

Mihai Adrian Ionescu, Daniel Grogg, Marco Mazza, Nicoleta-Diana Ciressan

The design, fabrication and experimental investigation of 22-25 MHz fragmented-membrane MEM bulk lateral resonators (BLR) with 100 nm air-gaps on thin (1 and 6 [mu]m) silicon-on-insulator (SOI) are reported. Quality factors as high as 120,000 and motional ...

2008

Laterally vibrating-body double gate MOSFET with improved signal detection

Mihai Adrian Ionescu, Marco Mazza, Dimitrios Tsamados, Daniel Grogg, Nicoleta-Diana Ciressan, Hüseyin Cumhur Tekin

Laterally vibrating-body double-gate MOSFET that shows a +30 dB signal increase compared to an identical resonator operating with pure capacitive detection is reported. The double-gate MOSFET is fabricated on SOI substrate with silicon film thickness of 1. ...

2008

Oscillator Based on Suspended Gate MOS Transistors

Mihai Adrian Ionescu, Marco Mazza, Yogesh Singh Chauhan, Alexandru Rusu

The paper deals with the oscillator applications based on vibrating mode of the suspended gate SG-MOSFET transistor. In order to simulate the electrical behavior of the transistor a small-signal equivalent circuit of the gate is proposed and validated. An ...

2008

Fabrication of Silicon-On-Insulator MEM Resonators with Deep Sub-Micron Transduction Gaps

Mihai Adrian Ionescu, Cyrille Hibert, Marco Mazza, Nicoleta-Diana Ciressan

2007

Nano-gap MEMS resonators and adapted oscillator design

Anja Skrivervik, Mihai Adrian Ionescu, Julien Perruisseau-Carrier, Marco Mazza

2006