Publications by Hans Peter Herzig

Centimeter-Scale Propagation of Optical Surface Waves at Visible Wavelengths

Hans Peter Herzig, Nicolas Maxime André Descharmes, Gaël David Osowiecki, Babak Vosoughi Lahijani, Raphaël Barbey

Guiding and confining light at interfaces is crucial for applications involving light-matter interactions, such as surface spectroscopy, nonlinear optics, and quantum information technology. While dielectric surface waves offer promising perspectives for s ...

WILEY-V C H VERLAG GMBH2022

Spatial coherence properties of an LED-based illumination system for mask-aligner lithography

Hans Peter Herzig, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

A high-power LED-based illumination system has been developed as a replacement for the mercury arc lamps used in mask-aligner lithography. LEDs are arranged in a grid array and placed in the entrance aperture of individual reflectors. Those reflectors decr ...

SPIE2019

High power modular LED-based illumination system for lithography applications

Hans Peter Herzig, Marcel Groccia, Toralf Scharf, Wilfried Noell, Raoul Kirner, Johana Bernasconi

Mask-aligner lithography is a technology used to transfer patterns with critical dimensions in the micrometer range from below 1 micron for contact printing to a dozen of microns in proximity printing. This technology is widely used in the fabrication of M ...

2018

Inverse photonic design of functional elements that focus Bloch surface waves

Hans Peter Herzig, Myun Sik Kim, Babak Vosoughi Lahijani, Andreas Vetter

Bloch surface waves (BSWs) are sustained at the interface of a suitably designed one-dimensional (1D) dielectric photonic crystal and an ambient material. The elements that control the propagation of BSWs are defined by a spatially structured device layer ...

Nature Publishing Group2018

Toward Bloch Surface Wave-Assisted Spectroscopy in the Mid-Infrared Region

Hans Peter Herzig, Grégoire Maxime Smolik, Nicolas Maxime André Descharmes

We present the first observation of Bloch surface waves in the mid-infrared spectral range. Bloch surface waves are electromagnetic states that can propagate at the interface between a continuous dielectric medium and a periodic stack of materials. We desi ...

2018

Bloch Surface Waves Using Graphene Layers: An Approach toward In-Plane Photodetectors

Hans Peter Herzig, Richa Dubey, Myun Sik Kim, Babak Vosoughi Lahijani

A dielectric multilayer platform was investigated as a foundation for two-dimensional optics. In this paper, we present, to the best of our knowledge, the first experimental demonstration of absorption of Bloch surface waves in the presence of graphene lay ...

2018

High-power modular LED-based illumination systems for mask-aligner lithography

Hans Peter Herzig, Johana Bernasconi, Toralf Scharf

Mask-aligner lithography is traditionally performed using mercury arc lamps with wavelengths ranging from 250 nm to 600 nm with intensity peaks at the i, g and h lines. Since mercury arc lamps present several disadvantages, it is of interest to replace the ...

2018

Multiple self-healing Bloch surface wave beams generated by a two-dimensional fraxicon

Hans Peter Herzig, Myun Sik Kim, Babak Vosoughi Lahijani, Andreas Vetter

Nature Research2018

Hybrid surface wave device

Hans Peter Herzig, Myun Sik Kim

We present a hybrid surface wave device, which combines Bloch surface wave (BSW) and plasmonic nanoantennas. BSWs offer in-plane dark-field illumination. Nanoantennas squeeze the incidence into nano-size and enable far-field readout without near-field tech ...

IEEE2018

Observation of Bloch Surface waves in the mid-infrared spectral range

Hans Peter Herzig, Grégoire Maxime Smolik, Nicolas Maxime André Descharmes

We present the observation of Bloch Surface Waves in the mid-infrared spectral range. A dielectric multi-layer coating made of ZnSe and YbF3 deposited on a CaF2 substrate is designed and fabricated specifically for that purpose. The structure supports the ...

IEEE2018