Rapid deposition of hydrogenated microcrystalline silicon by a high current DC discharge
Graph Chatbot
Chat with Graph Search
Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.
DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.
Focused Electron Beam Induced Deposition (FEBID) is a rapid prototyping technique for the investigation, production and modification of 2 and 3-D nanostructures. The process takes place at room temperature, in the high-vacuum chamber of a Scanning Electron ...
We have synthesized Si Nps rich submicron area within a thin SiO2 layer using a new method called “stencil-masked ion implantation”. It consists in implanting silicon ions at ultra-low energy through windows (from 50nm to 2μm) opened in a stencil mask cont ...
Syntheses of ZSM-5 coatings on stainless steel plates were carried out via the substrate heating method. The reaction mixture was kept at temperatures below 100 °C, while the metal plates were heated to temperatures above 100 °C. It was demonstrated that c ...
This work presents the preliminary results on application of mineral sacrificial layer that is prepared to structure LTCC (low temperature co-fired ceramic). The proposed method suggests utilization of a sacrificial paste, which remains "permanent" during ...
Process optimization and properties of lead zirconate titanate (PZT) films for piezoelectric micromachined ultrasonic transducers (pMUTs) for scanning probe devices will be presented. The goal of the work was a replacement of the tetragenic and mutagenic s ...
We report on the fabrication and electrical characterization of functionalized solid-state nanopores in low stress silicon nitride membranes. First, a pore of approximately 50 nm diameter was drilled using a focused ion beam technique, followed by the loca ...
Thin colloidal photonic crystals were grown using shear-flow crystallization of polystyrene colloidal nanoparticles. The arrays consist of two types of domains, which are clearly visible on scanning electron microscopy patterns. Both domains have cubic clo ...
This work was accomplished in the context of systematic examination of a role played by electrolyte cation composition in electroreduction processes. The electrochemical behaviour of molten salts systems where CsCl was used as solvent for potassium and cae ...
TiN/AlTiN, TiN/CrN and CrN/AlTiN multilayer coatings have been deposited by the cathodic arc evaporation technique. The period is in the range 7-200 nm for a total thickness of 3 μm. The period's control of the nanoscaled hard films is achieved, a priori, ...
The goal of the present study was to assess the possibility to change the composition of a calcium phosphate scaffold from a high-temperature phase to a phase only stable at or close to room temperature without macrostructural changes. For that purpose, ma ...
