Microfabrication technologies for microsystems

With advances in micromachining and the consequent growing sophistication of microstructures, emphasis is increasingly being laid on the design and realization of complete microsystems. In this paper we will show some possible combinations of micromaching technologies to build microsystems for applications in photonics, nanoscience, bio-electrochemical systems and micromechanics. The common point of such a large range of devices is their fabrication technology, which has developed from the basic integrated circuit techniques into a wide spectrum of specific micromachining technologies. This article gives an overview of established and newer microfabrication technologies and their application to the construction of some chosen microsystems.