Publication

Realization and Characterization of MEMS-Based Programmable Slit Mask for Multi-Object Spectroscopy

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We present the design, fabrication process and characterization of multilayer miniaturized polydimethylsiloxane (PDMS)-based dielectric elastomer diaphragm actuators. The conductive stretchable electrodes are obtained by lowenergy metal ion implantation. T ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2011

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We are developing MEMS-based programmable reflective slit masks for future generation infrared multi-object spectroscopy (MOS) for space and ground-based telescopes. These devices are composed of monocrystalline silicon micromirrors of size 200 x 100 um(2) ...

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa2010

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The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...

ETH2009

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Application of Microstencil Lithography on Polymer Surfaces for Microfluidic Systems with Integrated Microelectrodes

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Microfluidic systems with incorporated microelectrodes are adopted in a variety of applications in life sciences. However, most of micro-electro-fluidic devices are fabricated based on silicon and silicon related materials micromachining processes, which a ...

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A monolithic silicon integrated optical micro-scanner is presented. The device consists of a mirror located on the tip of a thermal bimorph actuator beam. The fabrication process is very simple and compatible with IC fabrication techniques. The device is e ...

1999

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1998

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