Converse mode piezoelectric coefficient for lead zirconate titanate thin film with interdigitated electrode
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This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus par ...
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Lead oxide based ferroelectrics, represented by lead zirconate titanate (Pb(Zr,Ti)O-3) or PZT) are the most widely used materials for piezoelectric actuators, sensors and transducers due to their excellent piezoelectric properties. Considering lead toxicit ...
Thin film piezoelectric materials offer a number of advantages in microelectromechanical systems (MEMS), due to the large motions that can be generated, often with low hysteresis, the high available energy densities, as well as high sensitivity sensors wit ...
Understanding of polarization reversal mechanisms in ferroelectric films is essential for evaluation and prediction of the properties of ferroelectric devices including nonvolatile memories. The widely accepted approach based on the domain wall motion kine ...
A review is given on the current state of the art in piezoelectric micromachined ultrasonic transducers (pMUT). It is attempted to quantify the limits of pMUT's with respect to the electromechanical coupling, and to relate current achievements. Main needs ...
