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Thin film ethanol sensors made from alpha-Fe2O3 decorated with multiwall carbon nanotubes (MWCNTs) were manufactured by the electron beam deposition method. The morphology of the decorated alpha-Fe2O3/MWCNTs (25:1 weight ratios) nanocomposite powder was investigated using the scanning electron microscopy and X-ray diffraction techniques. The thickness of thin films has been determined from ellipsometric measurements. The response of manufactured sensors was investigated at different temperatures of the sensor work body and concentration of gas vapors. Good response of prepared sensors to ethanol vapors already at work body temperature of 150 degrees C was shown.
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