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Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

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Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

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Simulation of silicon KOH and dry etching methods for micromould fabrication

Microstereolithography

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

In-Plane Fabricated Insulated Gold-Tip Probe For Electrochemical And Molecular Experiments

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Vertical electrostatically 90° turning flaps for reflective MEMS display

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Method for fabricating micromirror for barcode reader, involves forming holes having diameter less than width of arms on both side of micromirror and wafer and on edges of region separating wafer and micromirror by etching arms

Simulation of silicon KOH and dry etching methods for micromould fabrication

Microstereolithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

In-Plane Fabricated Insulated Gold-Tip Probe For Electrochemical And Molecular Experiments

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

Vertical electrostatically 90° turning flaps for reflective MEMS display