Publication

Freestanding Silicon Photonic Ring and Disk Resonators

Abstract

We report freestanding silicon photonic ring and disk resonators fabricated in a simplified silicon photonics process based on IMEC's iSiPP5OG standard platform that have been released by a custom MEMS post-processing step. Experimental results show high optical Q-factors up to 3.6x10(4) for both ring and disk resonators, and extinction ratios larger than 20 dB. These functional, freestanding resonators demonstrate the compatibility of MEMS processing within a silicon photonics platform and open the possibility for large-scale integration of more complex photonic devices.

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Related concepts (23)
Silicon photonics
Silicon photonics is the study and application of photonic systems which use silicon as an optical medium. The silicon is usually patterned with sub-micrometre precision, into microphotonic components. These operate in the infrared, most commonly at the 1.55 micrometre wavelength used by most fiber optic telecommunication systems. The silicon typically lies on top of a layer of silica in what (by analogy with a similar construction in microelectronics) is known as silicon on insulator (SOI).
Photonic crystal
A photonic crystal is an optical nanostructure in which the refractive index changes periodically. This affects the propagation of light in the same way that the structure of natural crystals gives rise to X-ray diffraction and that the atomic lattices (crystal structure) of semiconductors affect their conductivity of electrons. Photonic crystals occur in nature in the form of structural coloration and animal reflectors, and, as artificially produced, promise to be useful in a range of applications.
Photonic integrated circuit
A photonic integrated circuit (PIC) or integrated optical circuit is a microchip containing two or more photonic components which form a functioning circuit. This technology detects, generates, transports, and processes light. Photonic integrated circuits utilize photons (or particles of light) as opposed to electrons that are utilized by electronic integrated circuits. The major difference between the two is that a photonic integrated circuit provides functions for information signals imposed on optical wavelengths typically in the visible spectrum or near infrared (850–1650 nm).
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