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Annealing and Etching Processes for Hafnium Carbide MEMS

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Micromachining of Hafnium Carbide

Fabian Linus Bauer

During this project, the microfabrication of Hafnium Carbide (HfC) was investigated. Multiple tools were considered and tested for their compatibility and effectiveness when working with HfC. The main method of choice for the machining of HfC thin films wa ...

2023

Etching selectivity and passivity of Al2O3 layers

Anil Can Kahraman

The project focuses on etching properties of the atomic layer deposition (ALD) of Al2O3. For this purpose, etching processes such as plasma etch with sulfur hexafluoride (SF6), gas etch with xenon difluoride (XeF2), wet etch with MIF developer (726 MIF) as ...

2023

Fabrication of Suspended Piezoelectrically Transduced Resonators

Loïc Chautems

The objective of this semester project is the fabrication of suspended piezoelectrically transduced resonators and to test and compare the quality of the piezoelectric layer using different processes and parameters. A functional fabrication process by lift ...

2023

Single crystal diamond micro-disk resonators by focused ion beam milling

Niels Quack, Teodoro Graziosi, Sichen Mi

We report on single crystal diamond micro-disk resonators fabricated in bulk chemical vapor deposition diamond plates (3 mm x 3 mm x 0.15 mm) using a combination of deep reactive ion etching and Focused Ion Beam (FIB) milling. The resulting structures are ...

AMER INST PHYSICS2018

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Van der Wal, Yexian Wu

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Elsevier2014

Méthode de décapage sélective d'un matériau sur un substrate en quartz par l'utilisation d'un faisceau -induit

Patrik Willi Hoffmann, Michel Rossi, Tristan Bret, Xavier Multone

A method and apparatus for local beam processing using a beam activated gas to etch material are described. Compounds are disclosed that are suitable for beam-induced etching. The invention is particularly suitable for electron beam induced etching of chro ...

2012

A network coding approach to the shipper detection problem

Christina Fragouli, Lorenzo Keller, Abdulkadir Karaagaç

This paper experimentally studies the reliability and delay of flooding based multicast protocols for a sniper detection application. In particular using an emulator it studies under which conditions protocols based on network coding deliver performance im ...

2011

In this thesis, the wafer-scale fabrication of SiN membranes, Au films and Au membranes with arrays of sub-µm holes is described. Two conceptually different processes (1) and (2) were developed, both of which are based on nanosphere lithography (NSL) with ...

EPFL2010

The shape and dimensions of an atomic force microscope tip are crucial factors to obtain high resolution images at the nanoscale. When measuring samples with narrow trenches, inclined sidewalls near 90 or nanoscaled structures, standard silicon atomic forc ...

2010

Direct polymer patterning by high energy reactive ion beam through stencil masks

Jürgen Brugger, Andreea Veronica Savu, Oscar Vazquez Mena

Polytetrafluoroethylene (PTFE) is a polymer with remarkable physico-chemical properties which has been used for membrane and biomedical applications [1]. This fluorpolymer is however difficult or cost- inhibiting to pattern with conventional methods with h ...

2010