Monolithic Piezoceramic Flexible Structures for Micromanipulation

This paper presents several flexible structures cut directly into piezoelectric ceramics. Some parts of these structures are active while other play the role of joints or levers. With this innovative technology, this displacement of the piezos has been amplified by a ratio greater than 50 to 1. The actuating principle is discussed and the following three prototypes are presented. A micro-gripper with an integrated force sensor and a X-Y stage have been tested and characterized. A micro-robot actuated by Stick & Slip has also been developed taking advantage of this new technology. We believe that this new approach is of promise in the micro-manipulation and Scanning Probe Microscopy (SPM) fields.