Publication
Nouvelles technologies de microstructuration de type UV-LIGA et fabrication de composants micromécaniques
Related publications (34)
Tensile response of Strain-Hardening Ultra High Performance Fiber Reinforced Concretes under low loading rates and low temperatures
Strain Hardening Ultra High Performance Fiber Reinforced Concretes (SH-UHPFRC) are cementitious materials with exceptional mechanical properties and outstanding durability making them ideal materials for rehabilitation, for the improvement of load carrying ...
EPFL2019A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires
Yusuf Leblebici, Zuhal Tasdemir
Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...
Institute of Physics2016Microfluidic Scintillation Detectors for High Energy Physics
This thesis deals with the development and study of microfluidic scintillation detectors, a technology of recent introduction for the detection of high energy particles. Most of the interest for such devices comes from the use of a liquid scintillator, whi ...
EPFL2015Post-cmos processing and 3d integration based on dry-film lithography
Carlotta Guiducci, Yusuf Leblebici, Yüksel Temiz
A method for performing a post processing pattern on a diced chip having a foot-print, comprises the steps of providing a support wafer; applying a first dry film photoresist to the support wafer; positioning a mask corresponding to the footprint of the di ...
2015Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation
Nico de Rooij, Peter Van der Wal, Sotiria Psoma
A novel one-step microfabrication process of SU-8 films is proposed for developing inexpensive, small size and light-weight optical glucose micro-biosensors. Experimental work was performed in order to investigate whether the widely used in MEMS applicatio ...
2012Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
Nico de Rooij, Danick Briand, Francisco Molina Lopez, David de Koninck
The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >200 degrees C for similar to 1 s-sufficient ...
IEEE2012SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography
Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne
In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...
2011SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography
Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne
In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...
2011Photopatterning the mechanical properties of polydimethylsiloxane films
Silicone rubber films with graded and localized mechanical properties are prepared using two-part polydimethylsiloxane (PDMS) elastomer, photoinhibitor compounds and conventional photolithography. First the un-cross-linked PDMS is mixed with benzophenone. ...
American Institute of Physics2011MAGNETIC NANOCRYSTAL MODIFIED EPOXY PHOTORESIST FOR MICROFABRICATION OF AFM PROBES
Jürgen Brugger, Cristina Martin Olmos
Nanocomposites based on an organic polymer and inorganic nanocrystals (NCs) represent a class of high impact functional materials able to convey the unique size and shape dependent properties of nano-objects to highly processable resists.[1] In this work, ...
2010