Modelling and simulation of a high accuracy magnetometer

An entire microsystem for high accuracy magnetic field measurement based on vertical Hall devices has been simulated. In accordance with existing knowledge about semiconductor physics and experimental results, a functional SPICE- model for a vertical Hall device has been developed. This model was then applied to simulate an existing high accuracy magnetometer, including temperature and non-linearity compensation. The comparison of simulated and measured results shows that the real physical effects as well as the behaviour of the signal treatment electronics have been correctly implemented.