Publications related to Low-cost PDMS seal ring for single-side wet etching of MEMS structures

Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

Martinus Gijs, Hüseyin Baris Atakan, Rongrong Xiang

We present an aspect ratio dependent etching (ARDE) method, utilizing the Bosch dry etching process of silicon, to create the optimal silicon master microstructures for replication of polydimethylsiloxane (PDMS) microchannels that allow immobilizing C. ele ...

2018

Release area confinement in Contour Mode Resonators

Luis Guillermo Villanueva Torrijo, Annalisa De Pastina, Andrea Lozzi

In this paper we propose a modified fabrication process to finely define the region surrounding the resonator that undergoes Si etching in CMRs. The unpredictable undercut has been shown to lead to Q instability within microns' variation. High aspect ratio ...

Ieee2017

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Yusuf Leblebici, Zuhal Tasdemir

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016

Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches

Georg Fantner, Davide Sacchetto, Yusuf Leblebici, Oliver Peric, Zuhal Tasdemir

One-Dimensional (1D) nanostructures have gained a considerable attention in the field of semiconductor technology for the past several decades. With the help of rapid development in the process technology, it becomes possible to scale these nanostructures ...

2014

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Nico de Rooij, Terunobu Akiyama, Sebastian Gautsch, Peter Van der Wal, Yexian Wu

A new and versatile fabrication process of insulated gold tip probes for atomic force microscopy (AFM) is presented by Wu et al. (In-plane fabricated insulated gold-tip probe for electrochemical and molecular experiments, in: 2013 IEEE 26th International C ...

Elsevier2014

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

Herbert Shea, Xavier Maeder, Tobias Bandi

ABSTRACT The mechanical stability of silicon MEMS dies is strongly influenced by the microfabrication processes, especially grinding, dicing and etching, which leave characteristic damage (defects, cracks, dislocations...) in the substrate material. Specia ...

2014

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) beads with a mean diameter of 428 or 5 ...

2011

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Jürgen Brugger, Andreea Veronica Savu, Nicolas Blondiaux, Oscar Vazquez Mena, Harry Heinzelmann, Mona Julia Katharina Klein, Raphaël Pugin, Franck Montagne

2011

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Low-cost PDMS seal ring for single-side wet etching of MEMS structures

Micromachining of Hafnium Carbide

Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

Release area confinement in Contour Mode Resonators

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Microfluidic Scintillation Detectors for High Energy Physics

Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Graph Chatbot

Chat with Graph Search

Microfluidic Scintillation Detectors for High Energy Physics

In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Release area confinement in Contour Mode Resonators

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Improved test setup for MEMS mechanical strength investigations and fabrication process qualification

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

Micromachining of Hafnium Carbide

Variable-height microfluidic channels for accurate immobilization of C. elegans worms by using a single dry etching step

Top-Down Fabrication of Silicon Nanowires in Ultra-deep Trenches