3-D structuration of LTCC for Sensor Micro-fluidic Applications

Low Temperature Co-fired Ceramic (LTCC) Technology is recentlyaddressed to be a key approach among advanced packaging technologies, offering many advantages over its competitors. One of its most attractivefeatures is the ease of 3-D structuration thanks to the LTCC green tapes. These tapes can be easily cut into desired forms in the way to realize bothstructural and electrical functions under a single system. Three dimensional structures such as membranes, channels can be achieved either by cuttingand laminating LTCC tapes or by using a sacrificial layer. In this work, we demonstrate fabrication of an LTCC micro-fluidic sensor using carbon-paste as the sacrificial layer. The results indicate extremely fine-sized structural dimensions without deformation, which are attractive for pressureor thermal sensor applications.