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Toward a unified description of nonlinearity and frequency dispersion of piezoelectric and dielectric responses in Pb(Zr,Ti)O-3

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High Piezoelectric Longitudinal Coefficients in Sol-gel PZT Thin Film Multilayers

Paul Muralt, Antonia Neels, Silviu Cosmin Sandu, Alex Dommann, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

A five-layer stack of lead zirconate titanate (PZT) thin films with Pt electrodes was fabricated for potential applications in nanoactuator systems. The 1 mu m thick PZT films were deposited by a sol-gel technique, the platinum electrodes by sputtering. Th ...

Wiley-Blackwell2014

Comparison of Lead Zirconate Titanate Thin Films for Microelectromechanical Energy Harvester With Interdigitated and Parallel Plate Electrodes

Paul Muralt, Andrea Mazzalai, Nachiappan Chidambaram, Davide Balma

Lead zirconate titanate (PZT) thin films on insulator-buffered silicon substrates with interdigitated electrodes (IDEs) have the potential to harvest more energy than parallel plate electrode (PPE) structures because the former exploit the longitudinal pie ...

Ieee-Inst Electrical Electronics Engineers Inc2013

A uniaxial compressive stress significantly modifies the dielectric and piezoelectric response of Pb(Zr,Ti)O3 (PZT)-based piezoceramics. In soft PZT, the pre-stress decreases both the piezoelectric coefficient and its increment with increasing dynamical st ...

2012

Resonant PZT MEMS Scanner for High-Resolution Displays

Paul Muralt, Davide Balma, Sven Holmström

A resonant piezoelectric scanner is developed for high-resolution laser-scanning displays. A novel actuation scheme combines the principle of mechanical amplification with lead zirconate titanate (PZT) thin-film actuation. Sinusoidal actuation with 24 V at ...

Institute of Electrical and Electronics Engineers2012

Broadband Dielectric Response in Hard and Soft PZT

Li Jin

Lead zirconate titanate (Pb(Zr1-xTix)O3 or PZT) ferroelectric ceramics have been widely used in transducers, actuators, and sensors, since they posses high dielectric and piezoelectric properties with a relatively high temperature of operation. Commerciall ...

EPFL2011

The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper focuses on the fabrication and evaluation of vibration energy harvesting devices by utilizing an epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin film. The high quality of the c-axis oriented PZT layer results in a high piezoelectric coefficient and a low ...

2011

Dielectric and acoustical high frequency characterisation of PZT thin films

Paul Muralt, Janine Conde

Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...

Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010

Lattice dynamics and dielectric response of undoped, soft and hard PbZr0.42Ti0.58O3

Dragan Damjanovic, Li Jin, Viktor Porokhonskyy

In this study, ceramic samples of lead zirconate titanate Pb(Zr0.42Ti0.58)O3 (PZT 42/58) doped with Fe (hard) and Nb (soft) were studied by Raman, infrared (IR) and THz spectroscopy in the temperature range from 900 to 20 K. From the evaluation of the IR a ...

Taylor & Francis2010

Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...

EPFL2009

Piezoelectric materials are used in a wide range of applications, with lead zirconate titanate (PZT) ceramics being the dominant family of materials, due to high piezoelectric coefficients, dielectric permittivity and coupling factors. The high properties ...

EPFL2009