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Self-sensing actuation in piezoelectric actuators has been a growing research topic since 1992, with two main approaches having been identified: either by evaluating the dielectric displacement field within the piezoelectric through a measurement bridge, e ...
Mobile communication has grown explosively in recent years, leading to a strong demand for cheap, but high-performing bandpass filters with low insertion loss and smaller size. Surface acoustic wave (SAW) and thin film bulk acoustic wave (BAW) resonators r ...
Vibration mode and resonance frequency of piezoelectric MEMS ultrasonic sensors was investigated on buckled diaphragm structures. The buckling of the diaphragms was introduced intrinsically through residual stress control of the piezoelectric film, and ext ...
The influence of compressive strain on the linear electro-optic (EO) effect in c-domain (BaxSr1-x)TiO3 (BST) thin films was theoretically investigated using a phenomenological thermodynamic model. We considered that the c-domain BST thin films were grown o ...
Ferroelectric materials are used in actuators or sensors because of their non-volatile macroscopic electric polarization. GeTe is the simplest known diatomic ferroelectric endowed with exceedingly complex physics related to its crystalline, amorphous, ther ...
The EPFL – LAI is investigating novel haptic technologies for rendering rich vibrotactile feedback in digital musical interfaces. The main objective is to develop an interactive surface that is able to render a multi-touch vibrotactile stimulus using piezo ...
Scandium doped aluminium nitride (ScAlN) gained much attention during last years, since its piezoelectric response is much enlarged as compared to pure AlN films. Above 30% Sc the films are of high interest for piezoMEMS sensing and actuation, ultrasound g ...
The growth speed of (hkl) faces in the vapour phase, the absolute structure obtained by X-ray crystallography, and the value and the sign of the pyroelectric coefficient of meta-nitroaniline (mNA) were analysed in detail. The in situ observation of morpho ...
In this paper, we demonstrate the fabrication of contour-mode resonators (CMRs) with Al0.83Sc0.17N as a piezoelectric layer. Moreover, we assess the electromechanical coupling and the maximum achieved quality factor from 150 to 500 MHz. In comparison to pu ...
Downscaling of the minimal feature size, or the gate length has been the key for the exponential im-provement of the performance of the logic CMOS integrated circuits over the last six decades. How-ever, since about 2003, some fundamental limits in the dev ...