Concept

Variable capacitor

Publications associées (78)

A high-sensitivity and quasi-linear capacitive sensor for nanomechanical testing applications

Reymond Clavel, Johann Michler, Jean-Marc Breguet, Dongfeng Zhang

The design, modeling, fabrication and characterization of triplate differential capacitive sensors employed in novel on-chip tensile and compression material testing systems are reported, where the capacitive sensors are integrated to measure the load on t ...

2009

RF MEMS capacitive switch on semi-suspended CPW using low-loss high-resistivity silicon substrate

Mihai Adrian Ionescu, Julien Perruisseau-Carrier, Montserrat Fernandez-Bolanos Badia

A high capacitive ratio RF MEMS switch, with low-actuation voltage is designed, fabricated and experimentally validated on high-resistivity silicon (HRS) substrate. Thanks to very good fabrication control of all steps and to the high dielectric constant of ...

Elsevier2008

Introducing the Common Cross Connected Stage (C3S) for the 5L ANPC Multilevel Inverter

Alfred Rufer

This paper proposes a novel multilevel Power Electronics Building Block (PEBB) for the 5 level ANPC multilevel voltage source inverter [7]. The PEBB is composed of 6 switches in a crossed configuration [8] and one capacitor. It is common to the 3 phases of ...

2008

Programmable Switched Capacitor Finite Impulse Response Filter with Circular Memory Implemented in CMOS 0.18 μm Technology

Rafal Tomasz Dlugosz

This paper presents a programmable multi-mode finite impulse response (FIR) filter implemented as switched capacitor (SC) technique in CMOS 0.18 μm technology. Intended application of the described circuit is in analog base-band filtering in GSM/WCDMA syst ...

Springer Verlag2008

Process engineering and failure analysis of MEMS and MOEMS by Digital Holography Microscopy (DHM)

Mihai Adrian Ionescu, Christian Depeursinge, Etienne Cuche, Frédéric Montfort, Nicolas Aspert, Alexander Mehdaoui

Process engineering and failure analysis of MEMS and MOEMS require static and dynamical characterization of both their in-plane and out of plane response to an excitation. A remarkable characteristic of Digital Holography Microscopes (DHM) is the extremely ...

SPIE2007

Common-mode Oscillation in Capacitive Coupled Differential Colpitts Oscillators

Christian Enz, Uroschanit Yodprasit

A simple approach to the realisation of a differential Colpitts oscillator is to connect the grounded capacitor in the feedback network of two single-ended Colpitts oscillators together in series. As the output signals are expected to be differential, it i ...

2007

Circuit model and design of silicon-integrated CRLH-TLS analogically controlled by MEMS

Anja Skrivervik, Julien Perruisseau-Carrier

We present an integrated composite right/left handed transmission line (CRLH-TL) phase shifter analogically controlled by means of a MEMS series capacitor. The device is based on coplanar waveguide (CPW) technology and operates at a central frequency of 18 ...

2006

MEMS Capacitive Pressure Sensor Based on Polysilicon Sealed Membrane

Mihai Adrian Ionescu, Montserrat Fernandez-Bolanos Badia

This paper presents a pressure sensor based on a variable capacitor formed by a movable polysilicon sealed membrane sensitive to pressure. When operated as a pressure sensor two operation regions are observed, an exponentially sensitivity region at low pre ...

2006

Temperature dependence of the dielectric tunability of pyrochlore bismuth zinc niobate thin films

Alexander Tagantsev

The change in permittivity of bismuth zinc niobate (BZN) films with the cubic pyrochlore structure under an applied electric field was measured as a function of temperature. Dielectric measurements were performed using parallel-plate capacitor structures w ...

2005

High tuning range AlSi RF MEMS capacitors fabricated with sacrificial amorphous silicon surface micromachining

Mihai Adrian Ionescu, Philippe Renaud, Catherine Dehollain, Michel Declercq, Cyrille Hibert, Philippe Flückiger, Dimitrios Tsamados, Raphaël Fritschi, Florin Udrea

This paper reports the fabrication and electrical characterization of high tuning range AlSi RF MEMS capacitors. We present experimental results obtained by a surface micromachining process that uses dry etching of sacrificial amorphous silicon to release ...

2004

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