Concept

Mélange piranha

Publications associées (7)

A Deep Etching Mechanism for Trench-Bridging Silicon Nanowires

Introducing a single silicon nanowire with a known orientation and dimensions to a specific layout location constitutes a major challenge. The challenge becomes even more formidable, if one chooses to realize the task in a monolithic fashion with an extrem ...

Institute of Physics2016

Suspended micro-resonator fabrication: fusion bonding of Silicon Nitride interfaces

Annalisa De Pastina, Pierre-Emmanuel Marie Thiriet

This project aims to prove of the feasibility of Silicon Fusion Bonding for fabrication of micro- capillaries for gas cooling down. An optimal recipe for Silicon Fusion Bonding is developed, consisting of four steps: RCA cleaning, surface activation with O ...

2016

Piezoelectric AlScN thin films: A semiconductor compatible solution for mechanical energy harvesting and sensors

Paul Muralt, Ramin Matloub Aghdam, Silviu Cosmin Sandu, Andrea Mazzalai, Mahmoud Hadad, Nachiappan Chidambaram

The transverse piezoelectric coefficient e31,f of Al1-xScxN thin films was investigated as a function of composition. It increased nearly 50% from x = 0 to x = 0.17. As the increase of the dielectric constant was only moderate, these films are very suitabl ...

American Institute of Physics2013

Stimuli-responsive nanostructured surfaces

Ana Maria Popa

The coupling of stimuli-responsive macromolecules to nanostructured surfaces opens the perspective for the fabrication and integration of "smart" micro- and nano-electro-mechanical systems (MEMS&NEMS) in which the smallest motile unit is the polymeric chai ...

EPFL2009

Generic technological platform for microfabricationg silicon nitride micro-and nanopipette arrays

Nico de Rooij

In this paper, the design and the characterization of batch fabricated SixNy micropipette arrays with diameters ranging from 6 νm down to 250 nm are described. The process used to fabricate the micromachined pipettes includes a deep reactive ion etching st ...

2005

Small SiN AFM Cantilevers for High Frequency Application

Jürgen Brugger, Johannes Steen

‘Real-time’ nanoscale imaging and single molecule force spectroscopy of bio-chemical specimen based on atomic force microscopy (AFM) requires cantilevers with both low force constant and high-resonant frequency. The required spring constant should be betwe ...

2004

Low-cost PDMS seal ring for single-side wet etching of MEMS structures

Jürgen Brugger

We describe a new O-ring setup for wet-etching processes of microelectromechanical systems (MEMS) . Our new low-cost approach using siloxane-based seal rings entails the single-side etching of silicon and silicon dioxide using potassium hydroxide and buffe ...

1998

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