Concept

Microfabrication

Publications associées (307)

Multi-material and Multi-functional Optical Fibers: Fabrication and Opportunities

The fabrication challenges and application opportunities associated with the integration of novel materials at the micro- and nano-scale and prescribed positions within rigid and soft optical fibers will be presented. (C) 2020 The Author(s) ...

IEEE2020

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Tobias Kippenberg, Rui Ning Wang, Mikhail Churaev, Junqiu Liu, Tianyi Liu

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well ...

IEEE2020

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Henning Paul-Julius Stahlberg

Grayscale electron beam lithography (g-EBL) is a fabrication technique that allows for tunable control of resist topography. In most cases, the height of the structures is in the submicron regime. Here, we present an extensive experimental characterization ...

2020

Transient Electronics for Smart Biodegradable Medical Implants

Matthieu Jean Michel Rüegg

Bioresorbable implantable medical devices show great potential for applications requiring medical care over well-defined periods of time. Such implants naturally degrade and resorb in the body, which eliminates adverse long-term effects or the need for a s ...

EPFL2020

NMR microsystem for label-free characterization of 3D nanoliter microtissues

Jürgen Brugger, Giovanni Boero, Marco Grisi, Gaurasundar Marc Conley, Kyle Joel Rodriguez, Lukas Egli, Erika Riva

Performing chemical analysis at the nanoliter (nL) scale is of paramount importance for medicine, drug development, toxicology, and research. Despite the numerous methodologies available, a tool for obtaining chemical information non-invasively is still mi ...

2020

Frequency-scalable fabrication process flow for lithium niobate based Lamb wave resonators

Luis Guillermo Villanueva Torrijo, Muhammad Faizan

In this paper, we demonstrate the fabrication and characterization of lithium niobate (LN) based Lamb wave mode (S0 and SH0) resonators that address the stringent requirements of RF filtering for modern communication systems. The devices consist of a 400 n ...

IOP PUBLISHING LTD2020

Fabrication and Characterization of MEMS Piezoelectric Accelerometers

Myriam Yvonne Käppeli

In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricate ...

2020

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...

Elsevier / William Andrew Publishing2019

Soft And Wearable Transducers: Opportunities And Challenges For Daily Use

Stéphanie Lacour

Soft bioelectronic interfaces are broadly defined as microfabricated devices, distributed over large-areas, and with mechanical properties suited to comply the soft and dynamic biological tissues. The hybrid integration and processing of materials ranging ...

IEEE2019

Biodegradable Wireless Microheaters for Transient Biomedical Implants

Jürgen Brugger, Giovanni Boero, Matthieu Jean Michel Rüegg, Remo Blum

Transient electronics show a great potential in the field of bioresorbable medical implants, for applications such as localized drug delivery for wound healing or following a surgical procedure. Once their function is fulfilled, such implants naturally deg ...

2019

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