Interféromètre de Michelson

Résumé

vignette|upright=2|Exemple d'interféromètre de Michelson présent dans les laboratoires de l'Institut d'Optique. L'interféromètre de Michelson (parfois appelé simplement « Michelson » par métonymie) est un dispositif optique inventé par Albert Abraham Michelson et Edward Morley qui produit des interférences par division d'amplitude (mais aussi par division du front d'onde dans le cas d'une source ponctuelle). Il est constitué essentiellement de deux miroirs et d'une lame semi-réfléchissante. Les deux configurations possibles d'utilisation sont la configuration en lame d'air et celle en coin d'air. Présentation La théorie L'interféromètre de Michelson est constitué de deux miroirs M1 et M2 et d'une lame semi-réfléchissante appelée séparatrice. Ces trois éléments sont orientables et M2 est déplaçable par translation (pour ajuster la distance notée d sur le schéma) Sur le schéma ci-contre, qui modélise un Michelson utilisé en lame d'air, la source de lumière envo

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https://fr.wikipedia.org/wiki/Interf%C3%A9rom%C3%A8tre_de_Michelson

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High resolution differential laser interferometry for the VLTI (Very Large Telescope Interferometer)

Olivier Boris Scherler

One method for locating extrasolar planets is to observe the lateral movement of a star in the sky caused by a planet in orbit around it. In order to detect this displacement, the angular position of the star has to be measured with high accuracy. This technique is called astrometry. The Very Large Telescope Interferometer (VLTI) is operated by the European Southern Observatory and located at the Paranal Observatory in Chile. The purpose of the PRIMA instrument (Phase Referenced Imaging and Micro-arcsecond Astrometry) of the VLTI is to perform high-resolution astrometric measurements and high-resolution imaging of faint stars using white light interferometry, by combining the light collected by two telescopes. In order to allow the detection of extrasolar planets, the astrometric measurement has to be performed with micro-arcsecond accuracy. In astrometric mode the PRIMA instrument observes two targets at the same time: the object of scientific interest, and a bright reference star. The angular position of the science object relative to the reference star is obtained by monitoring the differential optical path travelled by the light of each object in two separate white-light interferometers. The aim of this work was to develop a high-resolution laser metrology based on superheterodyne interferometry, with an accuracy of 5 nm over a differential optical path of 100 mm. Moreover the laser source had to be stabilised on an absolute frequency reference, in order to ensure the long-term stability and calibration required to achieve the target performance. Superheterodyne interferometry allowed the direct measurement of the differential optical path using two heterodyne interferometers working with two different frequency shifts. The differential phase measurement between the two interferometers was obtained by electronic mixing of the two heterodyne signals, leading to the differential optical path needed for the astrometric measurement

Institut de Microtechnique, Université de Neuchâtel2006

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In this paper, we review recent advances in optical microinstruments based on distributed Bragg reflectors (DBR) focusing mainly on two application areas: spectrometry and profilometry. For spectrometry applications, we consider state-of-the-art architectures. Among these are novel architectures of high-Q Fabry-Perot resonators based on cylindrical surfaces. In addition, we consider a microelectromechanical Michelson interferometer based on a robust (silicon-air) beam splitting interface. Its measurement principle relies on recording the spatial interferogram using movable mirror followed by inverse Fast Fourier transform (iFFT) to deduce the spectral content of the tested sample. For profilometry applications instead, an elaborated Michelson interferometer based on planar DBR is deployed for profile measurements using the technique of wavelength sweep and FFT to extract the dimensional characteristics. In the last section, we revisit the applications of DBR structures in optofluidics wherein a curved FP cavity has been deployed for optical trapping and binding of microparticles. Besides, a Michelson-based optofluidic probe has been deployed for off-chip measurements of fluid refractive index and absorbance. Globally, DBR based microinstruments demonstrate a strong potential in the targeted application areas.

Ieee-Inst Electrical Electronics Engineers Inc2015

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Miniature silicon Michelson interferometer characterization for dimensional metrology

Maurine Malak Karam Awadallah

Dimensional metrology applications require performing measurements of profile and form/shape of parts at a nanometer-level of accuracy. Therefore, the metrological characteristics of a miniature optical micro-probe based on a Michelson interferometer are evaluated. The optical micro-probe is designed to perform dimensional measurements with a target uncertainty in the order of few nanometers. Two microprobe designs having reflection-transmission ratios of 75-25% and 25-75%, are characterized. Two optical setups have been implemented as well: firstly, using a single laser diode with a 1550.3 nm wavelength and secondly using a tunable laser source in the C-L bands. The characterization of the two micro-probes is performed using a new ultra-precise test bench, with respect to both dissociated metrology structure and Abbe principles. The experiments allow the evaluation of the error sources such as: stability, axial motion errors (residual errors), material dependence, tilt angle and roughness of the tested object. The experimental results revealed that dimensional measurements could be achieved with nanometer-scale errors, ranging from 2 nm to 15 nm, depending on the probe design and the reflectance of the device under test. (C) 2015 Elsevier B.V. All rights reserved.

Elsevier Science Sa2015

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High resolution differential laser interferometry for the VLTI (Very Large Telescope Interferometer)

Olivier Boris Scherler

Institut de Microtechnique, Université de Neuchâtel2006