Jürgen Brugger, Andrzej Kulik, Giovanni Boero, Johannes Steen, Florian Calame, Kyumin Lee
We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened ...
2006
