RIE of Solenoidal Microcoil Glass Mould with Integrated Sample Container for Micro-MRI

Micro-MRI is an imaging technique used to obtain information on cellular biochemistry by spatial mapping of 1H NMR relaxation times. The sensitivity and MRI resolution of solenoidal receive coils is superior to spiral coil geometries. We developed a new MEMS-based fabrication method promising to overcome many of the disadvantages of previously developed Micro-MRI systems.