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Finite element analysis and experiments on a silicon membrane actuated by an epitaxial PZT thin film for localized-mass sensing applications

Publications associées (40)

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Theoretical Analysis of Mechanical Displacement Measurement Using a Multiple Cavity Mode Transducer

Tobias Kippenberg, Jens Dobrindt

We present an optomechanical displacement transducer that relies on three cavity modes parametrically coupled to a mechanical oscillator and whose frequency spacing matches the mechanical resonance frequency. The additional resonances allow reaching the st ...

2010

The progress in the technology of microelectronic devices has led to a strong miniaturization and high performance for circuits and systems, enabling modern applications such as mobile computing and communications. Today, remaining "off-chip" components th ...

EPFL2010

An ultrasensitive vibrating channel mass sensor based on tunnelling current detection

Maurizio Migliore

We present a new design of a mass sensor capable of detecting mass values in the zeptogram range. The sensor comprises a resonant beam and two gate electrodes used to oscillate the beam at its resonance frequency. The detection method is based on the tunne ...

World Scientific And Engineering Acad And Soc, Ag Loannou Theologou 17-23, 15773 Zographou, Athens, Greece2010

Observation of a Charmoniumlike Enhancement in the γγ→ωJ/ψ Process

Olivier Schneider, Chao Wang, Tagir Aushev, Remi Léandre Albert Louvot, Ji Hyun Kim, Jing Li

We report the results of a search for a charmoniumlike state produced in the process gamma gamma -> omega J/psi in the 3.9-4.2 GeV = c(2) mass region. We observe a significant enhancement, which is well described by a resonant shape with mass M = (3915 +/- ...

2010

Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...

EPFL2009

Nanogap MEM resonators on SOI

Nicoleta-Diana Ciressan

Today's consumer electronics based on a large variety of time-keeping and frequency reference applications is based on quartz-crystal oscillators, because of their excellent performances in terms of quality factor, thermal and frequency stability. However, ...

EPFL2009

Micromirrors for integrated tunable mid-infrared detectors and emitters

Niels Quack

The mid-infrared range is of interest in spectroscopic applications, due to the large number of organic compounds that exhibit characteristic absorption bands in this spectral region. Semiconductor technology, however, has been developed mainly for the nea ...

ETH2009

Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...

EPFL2009

Single-photon and photon-number-resolving detectors based on superconducting nanowires

Francesco Marsili

Nanowire superconducting single photon detectors (SSPDs) [1] are characterized by very high sensitivity in the near infrared (detection efficiency η up to 30%, for a dark count rate DK of few Hz), speed (up to ∼1 GHz repetition rate) and time resolution (j ...

EPFL2009

Laser applications in thin-film photovoltaics

Christophe Ballif, Andrea Feltrin, Benjamin Strahm

We review laser applications in thin-film photovoltaics (thin-film Si, CdTe, and Cu(In,Ga)Se2 solar cells). Lasers are applied in this growing field to manufacture modules, to monitor Si deposition processes, and to characterize opto-electrical properties ...

Springer Verlag2009