Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3
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There is a need for chemically resistant coatings that protect the exposed surface of microfluidics components. Pinhole free films with low stress and a good uniformity on flat and inclined surfaces are required. In this study, amorphous silicon carbide (S ...
The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure ...
ECOLE POLYTECHNIQUE FEDERALE LAUSANNE (ECOL-Non-standard) BENVENUTI G (BENV-Individual) AMOROSI S (AMOR-Individual) HALARY-WAGNER E (HALA-Individual)2002
Deposition of a hydrothermal method has a number of advantages; low deposition temperature, high-purity, deposition on a three-dimensional structure, and a large thickness. The present paper investigates the improvement of an epitaxial lead zirconate titan ...
Firsts results on particle detection using a novel silicon pixel detector are presented. The sensor consists of an array of 48 square pixels with 380 μm pitch based on a n-i-p hydrogenated amorphous silicon (a-Si:H) film deposited on top of a VLSI chip. Th ...
Localized electrochemical deposition (LECD) is an emerging technology for inexpensive and effective fabrication of high-aspect-ratio microstructure of diverse materials. Microradiology with coherent X-rays enabled study of this process in real-time. This l ...
A diol-based sol-gel method was used to prepare UV sensitive precursor solutions in the processing of modified lead titanate ferroelectric thin films. Films were deposited by spin-coating onto platinized Si-based substrates. A preferential orientatio ...
We study the deposition of Ag ions, and size selected Ag/sub 7/ and Ag/sub 19/ cluster ions on Pd(100) at total kinetic energies of 20 eV and 95 eV using thermal energy atom scattering and molecular dynamics simulations. We find that at all energies Ag ato ...
Integrated optical devices can be fabricated by the deposition of an electrode/piezoelectric/electrode multilayer thin film structure onto optical fibers, The particular structure used in this work is Au/PbTiO3/Pt/Ti, where the PbTiO3 is deposited by DC re ...
All-fiber optical phase modulators were fabricated by coating standard telecommunication optical fibers with thin films of piezoelectric ZnO. Piezoelectric optical fiber coatings of PbZrxTi1-xO3(PZT) were also produced, and the actuation capability necessa ...
A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...
