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Post-cmos processing and 3d integration based on dry-film lithography

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Post-cmos processing and 3d integration based on dry-film lithography

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In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Post-CMOS Processing and 3-D Integration Based on Dry-Film Lithography

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SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

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In-plane fabrication of insulated gold-tip probes for electrochemical and force spectroscopy molecular experiments

Post-CMOS Processing and 3-D Integration Based on Dry-Film Lithography

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

A CMOS-Compatible, Low-Loss, and Low-Crosstalk Silicon Waveguide Crossing

A CMOS Compatible Chip-to-Chip 3D Integration Platform

3D Integration Technology for Lab-on-a-Chip Applications

Fluorescence based low-cost microbiosensors using simultaneously microfabrication process and enzyme immobilisation

SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

MICROFABRICATION AND PACKAGING OF A RUBIDIUM VAPOR CELL AS A PLASMA LIGHT SOURCE FOR MEMS ATOMIC CLOCKS