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Monolithic Fabrication of Silicon Nanowires Bridging Thick Silicon Structures

Publications associées (58)

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How roughness emerges on natural and engineered surfaces

Jean-François Molinari, Ramin Aghababaei

Roughness, defined as unevenness of material surfaces, plays an important role in determining how engineering components or natural objects interact with other bodies and their environment. The emergence of fractal roughness on natural and engineered surfa ...

SPRINGER HEIDELBERG2023

Development of a road bridge digital twin for simulating traffic loadings

The bridge over the Venoge, built in 1966 and extended in 1997, is a composite bridge located on the highway between Lausanne and Geneva. The aim of this thesis will be to develop a digital twin of this bridge, which consist of a digital representation as ...

2022

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been dri ...

EPFL2022

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

We question the values that inform the artificial intelligence (AI) strategies developed by governments and institutions at the global level. In particular, we investigate the connection between governments? and institutions? fundamental values, second-ord ...

IEEE COMPUTER SOC2020

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Antonia Neels, Yusuf Leblebici, Alex Dommann, Zuhal Tasdemir, Simone Dolabella

Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and na ...

INT UNION CRYSTALLOGRAPHY2020

Timing-Driven Placement for FPGA Architectures with Dedicated Routing Paths

Paolo Ienne, Grace Zgheib, Stefan Nikolic

The idea of introducing dedicated, fast paths between certain FPGA elements in order to reduce delay is neither new nor particularly hard to come up with. What is less obvious, however, is how to put such paths to actual use. In this work, we propose an ef ...

IEEE2020

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We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid chi((2))-chi((3)) microresonators with Q similar to 10(6), as well ...

IEEE2020

Superplastic behavior of silica nanowires obtained by direct patterning of silsesquioxane-based precursors

Yusuf Leblebici, Mohammad Nasr Esfahani, Mustafa Yilmaz

Silica nanowires spanning 10 μm-deep trenches are fabricated from different types of silsesquioxane-based precursors by direct e-beam patterning on silicon followed by release through deep reactive ion etching. Nanowire aspect ratios as large as 150 are ac ...

Institute of Physics2017

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Nanoscale building blocks impart added functionalities to microelectromechanical systems (MEMS). The integration of silicon nanowires with MEMS-based sensors leading to miniaturization with improved sensitivity and higher noise immunity is one example high ...

American Vacuum Society2017