Sensorless Quasi-static Piezoelectric Actuator for Micro-Robotics

Research interest into the miniaturisation of micro-robots has soared in recent years due to the availability of suitable integrated actuators. The reduction in size of these components is achieved through the implementation of Self-Sensing Actuation (SSA). This approach foregoes the need for external sensors which increase the encumbrance of micro-robots. The SSA approach is all the more relevant with piezoelectric actuators due to the reversible properties of piezoelectricity. The present thesis endeavours to explore the topic of piezoelectric SSA by applying a focus on the fundamental theory supporting the approach. It would then be possible to determine how a piezoelectric actuator could be tailored for SSA, particularly at the quasi-static ranges of frequencies that characterise robotic manipulation tasks.

A general model describing the piezoelectric actuator as a system with electro-mechanical inputs and outputs has been formulated: the inputs are the force and the voltage, resulting in a displacement and accumulated electrical charge as outputs. It is shown that all piezoelectric actuators follow this model form, which can be summarised through the description of three parameters: the stiffness, the capacitance, and a coefficient named beta. The latter describes the electro-mechanical coupling between charge accumulation and force, and is the most critical characteristic when aiming for high precision SSA. It is then demonstrated through dynamic modelling of piezoelectric actuators using bond graph models that the performance of the position and force sensorless estimation is intimately tied to these three actuator characteristics. Since these are a function of the actuator's design parameters, the self-sensing performance may be drastically improved at the design level.

By deriving design guidelines from an actuator design study based on an analytical model, a SSA demonstration prototype is developed. A batch of piezoelectric benders are manufactured with sub-mN sensorless estimation accuracies in mind. A test environment supporting these actuators is designed with the specific goals of determining their parameters experimentally, and of providing the grounds for the testing of diverse SSA implementations. After a measurement campaign providing a statistical appreciation for the parameters of the actuator batch, a calibrated self-sensing implementation approach is discussed. With this approach, it is shown that force estimation accuracies of 0.25 mN for durations of up to 60 s are within the grasp of these actuators tailored to SSA. Longer durations that guarantee high estimation accuracies would be acquired by focusing more research effort into the delicate task of measuring minute electrical charges.

In light of some inconsistencies between model predictions and experimental data, an updated model is proposed: the error of the beta coefficient and the stiffness are reduced to 3% and 12% respectively. From this model describing parameters with non-monotonic characteristics, a multi-objective optimisation study is proposed to simultaneously optimise an actuator design for high sensitivity and low estimation error. The resulting piezoelectric actuator design provides a beta coefficient of -4.62nC/mN, corresponding to a sensitivity increase of 52% compared the previously fabricated actuator, and a sensitivity increase by a factor of 9.5 compared to a commercial actuator of similar morphology.

Modélisation et commande du moteur piézoélectrique à onde progressive

Matteo Bullo

Piezoelectric motors are resonant vibromotors. They represent a new actuator generation in the field of servo-drives. In particular, the travelling wave ultrasonic motor presents a high torque at low speed, a zero speed torque without feeding, low sensitivity to electromagnetic disturbances as well as being a more compact solution if compared to conventional electromagnetic motors. Much researches has been performed by others to determine an analytical model based on the identification of an electromagnetic equivalent circuit or on exploitation of a theoretical model based on numerical approaches, which use finite elements methods. While leading to satisfactory analysis, these modeling methods can hardly be exploited in the design of control algorithms. Indeed, they require considerable processing resources to generate and visualize the results. For this reason, we introduce in this thesis, an analytical model that is easily adaptable to operational applications and control techniques. The proposed analytical model has been validated by comparing measured characteristics with those obtained in simulations, which was possible thanks to the realization of a modular test bench. The travelling wave ultrasonic motor is characterized by strong non-linearity. It also depends highly on the wear state of the materials, which is difficult to model, and on the contact surface between stator and rotor. In addition, the mechanical resonance frequency experiences drift due to the variations of temperature. These considerations of strong non-linearities and parameter sensitivities of the motor represent a challenge for the study and design of an efficient and robust control strategy. We introduce with this thesis a new control approach that guarantees a closed loop response which is independent of the motor operating point. Moreover, the proposed control method allows to avoid the discontinuities typically present with this type of actuator with a very reasonnable hardware requierments. Finally, an important extension in the product range of the piezoelectric actuators is proposed in the last part of this thesis. It acts to develop an fMRI (functional Magnetic Resonance Imaging) compatible haptic interface with one degree of freedom. The use of a robotic interface in conjunction with an fMRI environment would enable neuroscientists to investigate the brain mechanism used to perform tasks with arbitrary dynamics, and could become a critical tool in neuroscience and rehabilitaiton. There is, however, a major problem for robot working within an fMRI environment : conventional actuators and materials interfere with the strong permanent magnetic field and the fast switching magnetic field gradients. Consequently, non-ferromagnetic materials must be used to avoid forces on the device itself, that can compromise its performance and may result in hazardous conditions for the patient or the medical staff. In addition, the materials should be non-conducting to avoid the generation of eddy currents. The travelling wave ultrasonic motor was used because it provides benefits compared to the conventional electromagnetic actuators. Non-ferromagnetic piezoelectric ceramic material is used and as a result motor operation is not affected by the presence of the strong magnetic fields ecountered in the clinical scanners.

EPFL2005

Sensorless Position Control of Piezoelectric Ultrasonic Motors

Markus Flückiger

This dissertation considers mechatronic systems driven by piezoelectric ultrasonic motors (PUM). The focus is set on optimal system design and sensorless position control. Mechatronic industry faces the challenge to deliver ever more efficient and reliable products while being confronted to increasingly short time to market demands and economic constraints driven by competition. Although optimal design strategies are applied to master this challenge, they do not entirely respond to the given circumstances, as often only local criteria are optimised. In order to obtain a globally optimal solution, the many subfunctions of a mechatronic system and their models must be interrelated and evaluated concurrently from the very beginning of the design process. In this context PUM have been used increasingly during the last decade for various positioning applications in the field of mechatronic systems, laboratory equipment, and consumer electronics where their performances are superior to conventional electromechanical drive systems based on DC or BLDC motors. The position of the mobile component must be controlled. In some cases open-loop control is a solution, but more often than not sensors are used as feedback device in closed-loop control. Sensors are expensive, large in size and add fragile hardware to the device that compromises its reliability. Thus, not only the superior performance is not fully exploited but also the economical feasibility of the PUM drive system is jeopardised. Replacing sensors by advanced control techniques is an approach to these problems that is well established in the field of BLDC motors. Those sensorless control strategies are not directly transferrable, because of the fundamentally different working principles of PUM. Hence, the research of sensorless closed-loop position control techniques applicable to PUM and their validation with digitally controlled functional models is the very topic of this thesis. We propose a dedicated design methodology to this statement of the problem. A core model of the mechatronic system is conceived as general and simple as possible. It then develops for the different interrelated views reflecting the mechanical, electromechanical, drive electronic, sensorial and digital control functions of the global system. Each one becoming more specific and detailed in this process, the different views still enable mutual constraint adjustments and the dynamic integration of results from the other views during the design process. Starting with the stator of the PUM, a view describes the mechanical displacement. An electric equivalent model is written such that power input from the drive electronics is related to the mechanical energy transmitted to the mechanics. The resulting differential equations are solved by the finite element method (FEM). Position feedback configurations in the mobile part of the PUM are modelled analytically in order to be implemented in digital control and their electrical implications are updated to the stator model. In this way, sensors do not necessarily materialise physically any more, but are distributed among the mechanical configuration, the drive electronics and the digital controller. With respect to the sensor data, the controller is not simply receiving finalised data on the measured system parameter, but rather implements the sensor itself in software. Finally, the position detection performance obtained with the aforementioned design methodology was evaluated with the example of mechatronic locking devices actuated by custom-made as well as OEM motors. Functional models of motors, electronics and digital controllers were used to identify the limits of the proposed methods, and suggestions for further research were deduced. These results contribute to the development of robust sensorless position controllers for PUM.

EPFL2010

Development of Tunable Optical MEMS for Advanced Laser Beam Shaping, Homogenizing and Speckle Reduction

Jonathan Masson

In this thesis, the development, design, fabrication and characterization of three innovative laser beam shaping, homogenizing and speckle reduction devices are reported. Typical beam shaping devices are static and not easily adaptable to a large variety of optical setups. Furthermore, the main issues when shaping coherent light are diffraction effects, speckle patterns, interferences and wavelength dependency. The devices presented in this work solve these issues. The main subjects discussed are beam shaping of coherent light and speckle reduction. Beam shaping and speckle reduction are important in many applications like laser machining, illumination, laser displays and photolithography. The first device presented is a dynamic diffuser and homogenizer for line generation. The 1D linear diffuser consists of a large single crystal silicon membrane of 5x5, 10x10 or 15x15 mm2 areas and having a thickness of 5 μm to 10 μm. This optical surface has a 100 % fill factor. The goal is to deform the membrane in one dimension only so that the light is also diffused in one dimension. The free standing continuous silicon membrane has a bridge type configuration. The actuation of the device is made electromagnetically at resonance by the use of the Lorentz force. Stiffening beams are fabricated below the membrane to decouple the 1D and 2D modes and to prevents 2D dynamic deformations. The device is fabricated on SOI wafer using standard microfabrication technologies. The devices are characterized using a laser doppler vibrometer (LDV) and a goniometer. The LDV measurements have shown that 1D and 2D modes can be excited separately. The diffusion angle is tunable between 0 to 22 mrad. The device is used to smooth out the interference effects created by a static 1D beam shaping optical element. The relative optical power efficiency of is 99.8 %. The device is capable to sustain high optical load of at least 140 W/cm2. It is now being tested in an industrial environment with high power CO2 laser for sealing glass capillaries. The second device presented is a 2D dynamic diffuser. It has to fulfill several characteristics, namely to diffuse light with small and tunable angle with high efficiency, reduce the speckle contrast and interference patterns, have a simple driving and packaging scheme and handle high optical power. A device with a 5x5 mm2 optical surface is designed, fabricated and characterized. The mirror is made of a thin and large deformable a-Si membrane which is supported by an array of posts. The disposition of the posts determines how the membrane is deformed in smaller sub-reflecting elements. A periodic and a pseudo random arrangements of the post arrays are designed. Electrostatic actuation is used to deform the membrane. The whole v deformable mirror is fabricated over a scanning stage. Out of plane resonant comb drive actuators are used to actuate the scanning stage. The diffusion of the light is performed by the deformation of the membrane while the homogenization of the beam profile is accomplished by the simultaneous scanning of the whole deformed membrane. Optical simulations are successfully used to predict the optical properties of the diffuser and to set the requirements for the electro-mechanical part of the device design. The fabrication process is using parylene-C as a refilling material and as a sacrificial layer to enable the fabrication of a 100 % fill factor deformable mirror. The membrane is continuous and release hole free. It is aluminum coated and showed an absolute optical power efficiency of 81 % in the actuated state. The high optical power handling of the device could not be tested. Nevertheless , the material of the device is silicon and the stage is connected with large springs to the frame for high heat conductivity. The pseudo random devices showed ability to shape an incoming beam regardless of its intensity profile into a output beam having a Gaussian profile. Besides, the diffusion angle is small and tunable between 0 to 10 mrad FWHM. The periodic devices is able to transform an incoming Gaussian beam into a super Gaussian intensity profile. Finally, the dynamic diffuser is capable of reducing the speckle contrast of a laser beam projected on a diffusing screen. The speckle contrast is reduced from 0.7 to 0.21 using the device alone and it is reduced to 0.11 when the dynamic diffuser is used in combination with a static diffuser. Tunable diffusion angle, smoothing of interferences, tunable beam shaping and speckle re- duction is realized while keeping the degree of freedom of the device to a minimum. By taking advantage of the optical design of the pseudo random diffuser, only one control electrode is needed to deform the membrane and one signal is used to scan the diffuser. The result is a very compact device, simple actuation and a straightforward packaging schemes. The last device presented is a very small footprint speckle reduction device. A simple actuation scheme using comb drive actuators and four folded springs enable large in plane displacement of a random phase plate. 180 μm of in plane displacement is achieved with a driving voltage as low as 29 V. The speckle contrast is reduced to 0.21 when the device is translating at 314 Hz. A comprehensive study of the diffuser characteristics is made to understand the surface parameters of the diffuser that influence directly the performances on the speckle reduction. The surface profile of the binary height has to be well defined to insure a phase shift of π. This very small device is a good candidate for integration in any portable device where speckle reduction is needed.

EPFL2012