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Ultrasonic micromotors based on PZT thin films

Publications associées (41)

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Piezoelectric thin films for MEMS

Paul Muralt

A short overview is given on deposition and integration of PZT thin films on silicon for MEMS applications. The application principles are explained and the piezoelectric coefficients are compared with the ones of AlN and ZnO. The materials figure of merit ...

1997

Photoinduced poling of lead titanate zirconate thin films

Nava Setter

The influence of ultraviolet (UV) illumination on piezoelectric properties is investigated in lead zirconate titanate (PZT) thin films. It is found that the poling procedure is more effective when the film is exposed to a broadband UV light in the presence ...

1997

PZT thin films for micro sensors and actuators

Paul Muralt

The paper reviews different aspects of deposition, integration, and device fabrication of PbZrxTi1-xO3 (PZT) films for application in micromechanical systems. The deposition of such films and the principal processes for their integration onto silicon subst ...

1996

Design of a novel thin-film piezoelectric accelerometer

Nava Setter, Paul Muralt

A novel piezoelectric thin-film accelerometer has been designed and its performance has been analysed. The piezoelectric thin film (PZT for example) is delineated into an array of pads to reduce the sensor capacitance. By filling the cavity around the PZT ...

1996

Pb(Zr,Ti)O3 thin films by in-situ reactive sputtering on micromachined membranes for micromechanical applications

Nava Setter, Paul Muralt, Thomas Maeder

For micromechanical applications, piezoelectric PbZrTO3 (PZT) thin films have been deposited on metallised Si3N4/SiO2 layers on Si wafers. Films with compositions near the morphotropic phase boundary (x=0.53) were prepared at 600°C using a multitarget, in- ...

The Institute of Materials / Maney Publishing1995

Fabrication and characterization of PZT thin films for micromotors

Paul Muralt, Roland Luthier, Thomas Maeder

Piezoelectric membranes consisting of PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The PZT films were deposited by sputtering and sol gel techniques. Resonance amplitudes of up to 1000 nm/V ...

Taylor & Francis1995

PZT films for micro-pumps

Nava Setter, Dragan Damjanovic, Georges-André Racine

A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...

1995

Micromachined PZT thin film actuators for micromotors

Nava Setter, Paul Muralt, Roland Luthier, Thomas Maeder

We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a ...

1995

In-situ sputter deposition of PT and PZT films on platinum and RuO2 electrodes

Nava Setter, Paul Muralt, Thomas Maeder

The in-situ growth of PbZrxTi1-xO3 (PZT) and PbTiO3 (PT) thin films by reactive sputter deposition has been investigated for applications with silicon substrates. In-situ deposition from three simultaneously operating magnetron sources was applied. At the ...

Elsevier1995

Properties of Piezoelectric Pzt Thin Films for Microactuator Applications

Nava Setter, Paul Muralt, Dragan Damjanovic, Thomas Maeder

The piezoelectric properties of lead zirconate titanate (PZT) thin ﬁlms deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the p ...

1994