Scanning Probe Microscopy: Self-Sensing Cantilevers

This lecture covers the use of integrated sensors and actuators for cantilevers in Scanning Probe Microscopy, focusing on piezoresistive and piezoelectric effects. It explains the advantages of compact, integrated systems and the optimal location of sensors. The piezoresistive effect in silicon is detailed, along with the fabrication of piezoresistive cantilevers. Additionally, the lecture discusses piezoelectric cantilevers, comparing the frequency responses of different actuators. It concludes with the concept of parallel Scanning Probe Microscopy systems, featuring arrays of probes with integrated actuators and sensors, enabling high-speed data collection.