Lecture

MEMS & Cleanroom: Thin Material Layers and Vapor Creation

Description

This lecture covers the basics of MEMS and Cleanroom technology, including the process of thermal oxidation to create SiO2 layers, vapor creation for PVD using a vacuum chamber, and the principles of physical vapor deposition and sputtering for film formation.

Official source

https://mediaspace.epfl.ch/media/0_3xeg7xu5

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Ontological neighbourhood

Chemical engineering

Materials science: Thin film

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