Focused Ion Beam: Principles and Applications

This lecture covers the principles and applications of Focused Ion Beam (FIB) technology, including how it works, basic applications like imaging and milling, and advanced techniques such as FIB Nanotomography for 3D microscopy. It explains the components of a modern FIB system, the interaction between ion and electron beams, ion sources, and the ion-solid interaction. The lecture also discusses the advantages of using ions over electrons, different operating modes of FIB, and techniques like sputtering, deposition, and nanomachining. Additionally, it explores topics such as ion beam-induced imaging, ion-solid interactions, and the preparation of TEM samples using FIB.