Lecture

Focused Ion Beam: Principles and Applications

In course

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Description

This lecture covers the principles and applications of Focused Ion Beam (FIB) technology, including ion-solid interactions, FIB imaging, milling, deposition, and TEM sample preparation. It explains the advantages of using ions over electrons, the structure of FIB ion columns, and why Gallium is commonly used. The lecture also discusses the three basic operating modes of FIB, such as sputtering, deposition, and etching, along with the various effects of ion-solid interactions.

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Instructor

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Official source

https://mediaspace.epfl.ch/media/0_l96r2t5f

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Ontological neighbourhood

Chemical engineering

Materials science: Thin film

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