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Lecture
Stencil Lithography: Nanometer Scale Patterning
Description
This lecture introduces stencil lithography as a one-step, resistless process for high-resolution direct patterning at the nanometer scale. It covers the advantages over conventional lithography, such as no contact, no photoresist, and no high-temperature processes. Examples include deposition of various metals and challenges like membrane stability and alignment.
Official source
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