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Lecture
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
This lecture covers microfabrication technologies, including lithography, dry etching, MEMS, and cleanroom processes. It discusses contact and proximity exposure, projection lithography, resolution enhancement techniques, phase shift masks, immersion lithography, and the similarities between microscopy and lithography. The instructor also presents examples of resist profiles, the microfabrication sequence, electron-sample interactions, and the complexity of chip manufacturing with multiple lithography steps.