Physical Vapor Deposition: Principles and Applications

This lecture covers the principles and applications of Physical Vapor Deposition (PVD) in microfabrication technologies. It explains the vapor creation process, metal microstructure creation, cosine law, sputtering principle, magnetron sputtering, sputter efficiency, and multimaterial sputter tools. The instructor discusses the uniformity issues, lift-off technique, and advanced topics like composite materials and Pulsed Laser Deposition (PLD). The lecture also addresses the challenges of uniformity in evaporation, the creation of metal microstructures, and the efficiency of sputtering in different materials.