Lecture
Mechanical Surface Profiling: AFM Applications
In course
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Description
This lecture covers the use of mechanical surface profilers for film thickness measurement on MEMS devices, focusing on a bi-morph cantilever with chrome thin films. It also explores the application of atomic force microscopy (AFM) to characterize surface properties at high resolution, demonstrating its ability to measure surface roughness and provide 3D surface images. The lecture emphasizes the advantages of AFM over traditional methods, such as its high lateral resolution and non-damaging contact force, making it suitable for fragile surfaces.
Instructors (2)
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