A cleanroom or clean room is an engineered space, which maintains a very low concentration of airborne particulates. It is well isolated, well-controlled from contamination, and actively cleansed. Such rooms are commonly needed for scientific research, and in industrial production for all nanoscale processes, such as semiconductor manufacturing. A cleanroom is designed to keep everything from dust, to airborne organisms, or vaporised particles, away from it, and so from whatever material is being handled inside it.
A cleanroom can also prevent the escape of materials. This is often the primary aim in hazardous biology and nuclear work, in pharmaceutics and in virology.
Cleanrooms typically come with a cleanliness level quantified by the number of particles per cubic meter at a predetermined molecule measure. The ambient outdoor air in a typical urban area contains 35,000,000 particles for each cubic meter in the size range 0.5 μm and bigger, equivalent to an ISO 9 certified cleanroom. By comparison an ISO 14644-1 level 1 certified cleanroom permits no particles in that size range, and just 12 particles for each cubic meter of 0.3 μm and smaller. Semiconductor facilities often get by with level 7 or 5, while level 1 facilities are exceedingly rare.
The modern cleanroom was invented by American physicist Willis Whitfield. As employee of the Sandia National Laboratories, Whitfield created the initial plans for the cleanroom in 1960. Prior to Whitfield's invention, earlier cleanrooms often had problems with particles and unpredictable airflows. Whitfield designed his cleanroom with a constant, highly filtered air flow to flush out impurities. Within a few years of its invention in the 1960s, Whitfield's modern cleanroom had generated more than US50billioninsalesworldwide(approximately billion today).
The majority of the integrated circuit manufacturing facilities in Silicon Valley were made by three companies: MicroAire, PureAire, and Key Plastics.
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Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods.
HEPA (ˈhɛpə, high-efficiency particulate air) filter, also known as high-efficiency particulate absorbing filter and high-efficiency particulate arrestance filter, is an efficiency standard of air filters. Filters meeting the HEPA standard must satisfy certain levels of efficiency. Common standards require that a HEPA air filter must remove—from the air that passes through—at least 99.95% (ISO, European Standard) or 99.97% (ASME, U.S. DOE) of particles whose diameter is equal to 0.
A photoresist (also known simply as a resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This process is crucial in the electronics industry. The process begins by coating a substrate with a light-sensitive organic material. A patterned mask is then applied to the surface to block light, so that only unmasked regions of the material will be exposed to light. A solvent, called a developer, is then applied to the surface.
The student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
Micro- and nanofabrication can be taught to students and professionals by textbooks and ex-cathedra lectures, but the real learning comes from seeing the manufacturing steps as they happen. This MOOC
The student will learn procedures and applications of modern microfabrication technologies, as practiced in a clean room environment, in particular modern techniques that go beyond the classical steps
This project presents a microfabrication method for new generation particle detectors. This microsystem is supposed to detect ionizing radiation such as alpha particles, beta particles, and gamma rays. This project aims to miniaturized the otherwise well k ...
The understanding and manipulation of nanoscale analytes is a central theme in nanotechnology and has been one of the main driving forces behind the development of this field as we know it today. Furthermore, such a technology has the potential to also rev ...
In this master thesis, the use of MEMS technology to miniaturize existing accelerometers used for vibration sensing is demonstrated. An updated process flow was established and carried out in the cleanrooms. MEMS piezoelectric accelerometers were fabricate ...