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Explains the working principles of capacitive MEMS sensors, differential capacitors, MEMS microphones, and the impact of MEMS technology on consumer products.
Explores capacitor charging processes, Kirchhoff's Voltage Law in circuits, differential equations, time-dependent characteristics, and analysis of capacitors in parallel and series arrangements.
Explores scaling laws, simulations, and challenges in electrostatic MEMS, focusing on energy density, capacitance, actuators, and practical applications in haptic gloves.