Concept

Vacuum deposition

Related publications (593)

Optimization of high efficiency silicon heterojunction solar cells using silane-plasma diagnostics

Christophe Ballif, Antoine Descoeudres, Stefaan De Wolf, Loris Barraud, Priscille Marguerite Bôle Rothen

In silicon heterojunction solar cells, the passivation of the crystalline silicon wafer surfaces and fabrication of emitter and back surface field are all performed by intrinsic and doped amorphous silicon thin layers, usually deposited by plasma-enhanced ...

2010

Efficient optimization of high vacuum chemical vapor deposition of niobium oxide on full wafer scale

Paul Muralt, Patrik Willi Hoffmann, Ali Dabirian, Yury Kuzminykh, Estelle Wagner, Scott Harada, Giacomo Benvenuti

A systematic study of niobium oxide deposition using niobium tetraethoxy-dimethyl-amino-ethoxide (Nb(OEt)(4)(dmae)) precursor is presented. The deposition process was conducted in a high-vacuum chemical vapor deposition machine with precursor flux gradient ...

Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010

Oxygen permeation, mechanical and structural properties of multilayer diffusion barrier coatings on polypropylene

Yves Leterrier, Judith Helen Waller

To improve temperature durability for autoclaving of SiOx diffusion barrier coatings on polypropylene, plasma polymerized hexamethyldisiloxane (pp-HMDSO) is applied by plasma enhanced chemical vapour deposition as interlayer material and compared with resu ...

Institute of Physics2010

Quantifying electrochemical promotion of induced bipolar Pt particles supported on YSZ

Christos Comninellis, Wolfgang Harbich, Yuehui Li, Michael Hugentobler, Chun Xia

Electrochemical promotion (EP) of CO oxidation is shown for the first time on induced bipolar Pt particles supported on yttria-stabilized zirconia (YSZ). These Pt particles are formed by sputter deposition of high-purity Pt metal followed by sintering. Con ...

Elsevier2010

Growth study of indium-catalyzed silicon nanowires by plasma enhanced chemical vapor deposition

Anna Fontcuberta i Morral, Sonia Conesa Boj, Libo Yu, Père Roca i Cabarrocas

Indium was used as a catalyst for the synthesis of silicon nanowires in a plasma enhanced chemical vapor deposition reactor. In order to foster the catalytic activity of indium, the indium droplets had to be exposed to a hydrogen plasma prior to nanowire g ...

2010

Stenciled conducting bismuth nanowires

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Oscar Vazquez Mena, Katrin Sidler Arnet, Sam Neuser

Stencil lithography is used here for the fabrication of bismuth nanowires using thermal evaporation. This technique provides good electrical contact resistance by having the nanowire structure and the contact pads deposited at the same time. It has also th ...

2010

Grafting Crown Ether Alkali Host-Guest Complexes at Surfaces by Electrospray Ion Beam Deposition

Klaus Kern, Stephan Rauschenbach, Nicha Thontasen

The functionalization of surfaces with host guest compounds is promising for many applications, yet often limited by constraints such as the volatility of the functional compound or the lack of binding to the surface. We use electrospray ion beam depositio ...

2010

Multiple Nanowire Species Synthesized on a Single Chip by Selectively Addressable Horizontal Nanochannels

Anna Fontcuberta i Morral

The synthesis of horizontal porous anodic alumina (PAA) structures with individually addressable channel systems is demonstrated. This was achieved by developing a multicontact design of aluminum finger structures (two to Five contacts) on silicon wafers. ...

American Chemical Society2010

Polycrystalline ZnO:B grown by LPCVD as TCO for thin film silicon solar cells

Christophe Ballif, Sylvain Nicolay, Sylvie Faÿ

Conductive zinc oxide (ZnO) grown by low pressure chemical vapor deposition (LPCVD) technique possesses a rough surface that induces an efficient light scattering in thin film silicon (TF Si) solar cells, which makes this TCO an ideal candidate for contact ...

2010

Enzyme-based choline and l-glutamate biosensor electrodes on silicon microprobe arrays

Nico de Rooij, Peter Van der Wal, Olivier Frey

Brain-implantable microprobe arrays, 6.5 mm shaft-length, incorporating several recessed Pt microelectrodes (50 mu m x 150 mu m) and an integrated Ag/AgCl reference electrode fabricated by silicon micromachining dry etching techniques (DRIE) are described. ...

Elsevier2010

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