Lecture

Clip Mask Aligner Lithography

In course

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Description

This lecture covers the principles of UV lithography using a clip mask aligner, focusing on mask-based lithography for micro and nanofabrication. The instructor discusses photolithography techniques, equipment settings, and image scanning stages.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_0m7htzog

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Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

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