Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.
Explores scaling laws, simulations, and challenges in electrostatic MEMS, focusing on energy density, capacitance, actuators, and practical applications in haptic gloves.
Explores transduction through actuation mechanisms, covering force-based and deformation-based methods, shape memory polymers, electrostatic and magnetic actuation principles, and examples like Texas Instruments DLP & DMD.
