Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.
Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.
Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.
Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Explores microfabrication technologies, lithography, MEMS, cleanroom processes, resolution enhancement, phase shift masks, and chip manufacturing complexity.
Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
