Lecture
This lecture covers the principles and applications of optical microscopy, including variations such as bright field, dark field, and differential interference contrast. It also explains the configuration of an optical microscope, dimension measurements in XY and Z directions, surface profile measurements, and the use of atomic force microscopy for surface roughness measurement. Additionally, it discusses the electrical characterization of MEMS devices, resistivity measurements, and the importance of 4-point probe measurements. The lecture concludes with advanced techniques like SEM, TEM, FIB, and AFM, as well as addressing common issues like sample charging and gas-assisted etching and deposition.