Glass Microfabrication by Wet Etching

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Explores anisotropic etching of organic films and Al alloys, emphasizing the role of Al2O3 in Al etching and presenting examples of dry etching processes.

Etch Stop Techniques

Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.

Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Nanoscale MEMS: Fabrication, Tips, and Microscopy

Covers the fabrication of nanoscale MEMS devices and the operation of the Atomic Force Microscope for measuring ultrasmall forces on particles.

Deep Reactive Ion Etching: High Aspect Ratio Structures

Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.

Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Wet Etching: Chemical Reactions and Process Optimization

Explores the chemical reactions and optimization of isotropic wet etching in Si.