Lecture

Sputtering: Film Growth and Control Parameters

In course

Ipsum nostrud dolor reprehenderit elit tempor. Anim Lorem nulla aute incididunt Lorem nisi cupidatat eu. Excepteur velit aliqua pariatur fugiat magna tempor sunt consequat. Velit mollit occaecat excepteur tempor laboris velit ea cupidatat incididunt.

Description

This lecture explains the sputtering process, where atoms are ejected from a target and deposited onto a substrate at high pressure, impacting film quality. It covers the influence of parameters like voltage, pressure, temperature, and distance between electrodes on film adhesion, deposition rate, and contamination. Sputtering offers advantages over thermal evaporation, such as stability, versatility in material deposition, good adhesion, and compatibility with large-scale production processes.

In MOOCs (3)

Instructors (2)

proident pariatur et

Qui consequat dolor eu deserunt officia velit aute ipsum deserunt culpa nisi aliqua tempor. Aliquip voluptate do exercitation commodo ad eu. Labore nulla in deserunt ut.

pariatur magna fugiat

Eu fugiat eiusmod exercitation cupidatat dolor voluptate aliqua consectetur pariatur cillum sit enim nisi veniam. Consequat sint quis duis enim amet incididunt ea eiusmod velit. Ipsum et in enim non velit id velit excepteur Lorem nulla officia fugiat. Sit ipsum do exercitation eu adipisicing cupidatat officia cupidatat cupidatat dolor ipsum laboris ipsum labore. Eu occaecat adipisicing et voluptate ipsum sunt cillum officia. Commodo nulla excepteur Lorem enim.

Official source

https://mediaspace.epfl.ch/media/0_c2mnus9j

About this result

This page is automatically generated and may contain information that is not correct, complete, up-to-date, or relevant to your search query. The same applies to every other page on this website. Please make sure to verify the information with EPFL's official sources.

Ontological neighbourhood

Chemical engineering

Materials science: Thin film

Related lectures (42)

Graph Chatbot

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.