Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.
Explores lithography methods for defining patterns in micro/nano fabrication and discusses the importance and steps involved in the process.
Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.
Introduces the practical aspects of the Advanced MEMS course and explores MEMS technology, trends, sensors, actuators, and more.
