Lecture

Surface Profiling Techniques

In course

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Description

This lecture covers the principles and applications of surface profiling techniques, including white light interferometric surface profiling and laser beam surface profiling. It explains the setup and operation of Mirau interferometers, bi-morph measurements, and thin film stress measurements. The instructor discusses the non-contact and non-destructive nature of these techniques, their high resolution, and their importance in micro and nanofabrication processes.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_tqbx2o9h

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