Electron Beam Lithography: Interactions and Resist Contrast

About
Privacy
Disclaimer

Graph Chatbot

Related lectures (31)

Page 3 of 4

Scanning Probe Lithography: Nanometer Scale Patterning Techniques

Explores Scanning Probe Lithography for nanometer-scale patterning techniques and its applications in AFM exposure, DPN, and local field enhanced oxidation.

Scanning Probe Lithography: Nanoscale Applications

Explores Scanning Probe Lithography techniques in nanotechnology, including DPN and data storage technologies.

Inelastic Scattering in Transmission Electron Microscopy

Introduces inelastic scattering in transmission electron microscopy, focusing on electron energy-loss spectroscopy principles and applications.

Lithography: Photoresist Sensitivity and Modulation Transfer Function

Discusses photoresist properties in lithography resolution and the role of the optical transfer function.

Analytical Electron Microscopy: Spectroscopy and Microanalysis

Explores Analytical Electron Microscopy techniques for chemical analysis using EELS and EDX.

Beam-Matter Interactions

Explores beam-matter interactions, thermal effects, chemical effects, atomic displacements, and matter emission mechanisms in electron microscopy.

Thermal Scanning Probe Lithography: Nanometer Scale Patterning

Explores Thermal Scanning Probe Lithography history, Millipede system, AFM writing, 3D patterning, and emerging nanopatterning techniques.

Spectroscopy Basics

Covers the fundamentals of spectroscopy, including light sources, sample analysis, and energy levels.

Boltzmann Equation: Scattering Term

Covers the Boltzmann equation's scattering term and carrier scattering, including phonons, electrons, photons, and molecules.

Chemistry: Atomic Structure and Thermodynamics

Covers atomic structure, thermodynamics, material properties, and ideal gas law.